Invention Grant
- Patent Title: Arrangement and method for the generation of extreme ultraviolet radiation by means of an electrically operated gas discharge
- Patent Title (中): 通过电动气体放电产生极紫外线辐射的布置和方法
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Application No.: US12018353Application Date: 2008-01-23
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Publication No.: US07812542B2Publication Date: 2010-10-12
- Inventor: Guido Hergenhan , Christian Ziener , Mike Moeritz
- Applicant: Guido Hergenhan , Christian Ziener , Mike Moeritz
- Applicant Address: DE Goettingen
- Assignee: XTREME technologies Gmbh
- Current Assignee: XTREME technologies Gmbh
- Current Assignee Address: DE Goettingen
- Agency: Frommer Lawrence & Haug LLP
- Priority: DE102007004440 20070125
- Main IPC: H05B31/26
- IPC: H05B31/26

Abstract:
The object of an arrangement and a method for generating extreme ultraviolet radiation by an electrically operated gas discharge is to improve the adjustment of the layer thickness and, in particular, to prevent an uncontrolled accumulation of the metal layer to be applied to the rotary electrodes during pauses in the pulse operation for generating radiation when, e.g., liquid flows through these rotary electrodes for efficient cooling. In this connection, the rotating speed of the rotary electrodes can be increased in particular until there is always a freshly coated surface region of the electrodes in the discharge area at repetition frequencies of several kilohertz. An edge area to be coated on at least one electrode has at least one receiving area which extends in a closed circumference along the electrode edge on the electrode surface and which is formed so as to be wetting for the molten metal. A coating nozzle for regenerative application of the molten metal is directed to this receiving area and has a shutoff valve connected to a valve regulating device.
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