Invention Grant
US07812929B2 Electrostatic chuck with temperature sensing unit, exposure equipment having the same, and method of detecting temperature from photomask
有权
具有温度检测单元的静电吸盘，具有相同的曝光设备以及从光掩模检测温度的方法
- Patent Title: Electrostatic chuck with temperature sensing unit, exposure equipment having the same, and method of detecting temperature from photomask
- Patent Title (中): 具有温度检测单元的静电吸盘，具有相同的曝光设备以及从光掩模检测温度的方法
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Application No.: US11526802Application Date: 2006-09-26
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Publication No.: US07812929B2Publication Date: 2010-10-12
- Inventor: Myoung-Soo Lee , Chan-Uk Jeon
- Applicant: Myoung-Soo Lee , Chan-Uk Jeon
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2005-0089365 20050926
- Main IPC: G21K5/10
- IPC: G21K5/10
Abstract:
Disclosed is an electrostatic chuck with a temperature sensing unit, exposure equipment having the electrostatic chuck, and a method of detecting temperature on photomask surfaces. The temperature sensing unit and method of detecting temperature may include obtaining reflectance of a photomask using a multi-wavelength interferometer and determining a temperature on the photomask based on the reflectance.
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