Invention Grant
- Patent Title: Thin film transistor and method of fabricating the same
- Patent Title (中): 薄膜晶体管及其制造方法
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Application No.: US11457491Application Date: 2006-07-14
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Publication No.: US07815734B2Publication Date: 2010-10-19
- Inventor: Byoung-Keon Park , Jin-Wook Seo , Tae-Hoon Yang , Ki-Yong Lee
- Applicant: Byoung-Keon Park , Jin-Wook Seo , Tae-Hoon Yang , Ki-Yong Lee
- Applicant Address: KR Yongin
- Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee Address: KR Yongin
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2004-0079277 20041005
- Main IPC: H01L21/04
- IPC: H01L21/04 ; C30B25/12

Abstract:
Provided are a thin film transistor and method of fabricating the same, in which an amorphous silicon layer is formed on a substrate, a capping layer containing a metal catalyst having a different concentration according to its thickness is formed on the amorphous silicon layer, the capping layer is patterned to form a capping layer pattern, and the amorphous silicon layer is crystallized, such that the density and position of seeds formed at an interface between the amorphous silicon layer and the capping layer pattern is controlled, thereby improving the size and uniformity of grains, and in which polycrystalline silicon of desired size and uniformity is selectively formed at a desired position by one crystallization process, resulting in a thin film transistor having excellent and desired properties.
Public/Granted literature
- US20060243193A1 THIN FILM TRANSISTOR AND METHOD OF FABRICATING THE SAME Public/Granted day:2006-11-02
Information query
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