Invention Grant
US07815736B2 Supporting apparatus for supporting a growing single crystal of semiconductor material, and process for producing a single crystal 失效
用于支撑日益增长的半导体材料单晶的支撑装置,以及用于制造单晶的工艺

  • Patent Title: Supporting apparatus for supporting a growing single crystal of semiconductor material, and process for producing a single crystal
  • Patent Title (中): 用于支撑日益增长的半导体材料单晶的支撑装置,以及用于制造单晶的工艺
  • Application No.: US11509408
    Application Date: 2006-08-24
  • Publication No.: US07815736B2
    Publication Date: 2010-10-19
  • Inventor: Dieter Knerer
  • Applicant: Dieter Knerer
  • Applicant Address: DE Munich
  • Assignee: Siltronic AG
  • Current Assignee: Siltronic AG
  • Current Assignee Address: DE Munich
  • Agency: Brooks Kushman P.C.
  • Priority: DE102005040229 20050825
  • Main IPC: C30B35/00
  • IPC: C30B35/00 C30B15/00
Supporting apparatus for supporting a growing single crystal of semiconductor material, and process for producing a single crystal
Abstract:
An apparatus for supporting a single crystal during Czochralski crystal pulling below a thickened crystal neck has lower bearing surface(s) with a central opening inscribable with a horizontal circle of diameter D1, centered on a vertical axis, the bearing surface(s) connected by connecting element(s) to minimally one securing element for securing to a crystal pulling lifting device, the connecting elements arranged to provide a clear-space in the region above the bearing surface(s) in which a circle of diameter D2 centered on the vertical axis (D2>D1) is inscribable over a length of the vertical axis. The unitary apparatus is useful for crystal ingot growth by immersion into the semiconductor melt prior to growth of a Dash neck and a thickening of the Dash neck. The apparatus is then raised to support the crystal by bearing against the bottom of the thickening.
Information query
Patent Agency Ranking
0/0