Invention Grant
US07815736B2 Supporting apparatus for supporting a growing single crystal of semiconductor material, and process for producing a single crystal
失效
用于支撑日益增长的半导体材料单晶的支撑装置,以及用于制造单晶的工艺
- Patent Title: Supporting apparatus for supporting a growing single crystal of semiconductor material, and process for producing a single crystal
- Patent Title (中): 用于支撑日益增长的半导体材料单晶的支撑装置,以及用于制造单晶的工艺
-
Application No.: US11509408Application Date: 2006-08-24
-
Publication No.: US07815736B2Publication Date: 2010-10-19
- Inventor: Dieter Knerer
- Applicant: Dieter Knerer
- Applicant Address: DE Munich
- Assignee: Siltronic AG
- Current Assignee: Siltronic AG
- Current Assignee Address: DE Munich
- Agency: Brooks Kushman P.C.
- Priority: DE102005040229 20050825
- Main IPC: C30B35/00
- IPC: C30B35/00 ; C30B15/00

Abstract:
An apparatus for supporting a single crystal during Czochralski crystal pulling below a thickened crystal neck has lower bearing surface(s) with a central opening inscribable with a horizontal circle of diameter D1, centered on a vertical axis, the bearing surface(s) connected by connecting element(s) to minimally one securing element for securing to a crystal pulling lifting device, the connecting elements arranged to provide a clear-space in the region above the bearing surface(s) in which a circle of diameter D2 centered on the vertical axis (D2>D1) is inscribable over a length of the vertical axis. The unitary apparatus is useful for crystal ingot growth by immersion into the semiconductor melt prior to growth of a Dash neck and a thickening of the Dash neck. The apparatus is then raised to support the crystal by bearing against the bottom of the thickening.
Public/Granted literature
Information query
IPC分类: