Invention Grant
- Patent Title: PVD target
- Patent Title (中): PVD目标
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Application No.: US11426271Application Date: 2006-06-23
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Publication No.: US07815782B2Publication Date: 2010-10-19
- Inventor: Makoto Inagawa , Bradley O. Stimson , Akihiro Hosokawa , Hienminh Huu Le , Jrjyan Jerry Chen
- Applicant: Makoto Inagawa , Bradley O. Stimson , Akihiro Hosokawa , Hienminh Huu Le , Jrjyan Jerry Chen
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: C23C14/35
- IPC: C23C14/35

Abstract:
A physical vapor deposition target assembly is configured to isolate a target-bonding layer from a processing region. In one embodiment, the target assembly comprises a backing plate, a target having a first surface and a second surface, and a bonding layer disposed between the backing plate and the second surface. The first surface of the target is in fluid contact with a processing region and the second surface of the target is oriented toward the backing plate. The target assembly may include multiple targets.
Public/Granted literature
- US20070295596A1 PVD TARGET Public/Granted day:2007-12-27
Information query
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