Invention Grant
- Patent Title: End point detection method, end point detection device, and gas phase reaction processing apparatus equipped with end point detection device
- Patent Title (中): 端点检测方法,终点检测装置和装有端点检测装置的气相反应处理装置
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Application No.: US11991278Application Date: 2006-08-22
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Publication No.: US07815813B2Publication Date: 2010-10-19
- Inventor: Kazuhisa Takao , Hiroshi Ikeda , Hideki Matsumura , Atsushi Masuda , Hironobu Umemoto
- Applicant: Kazuhisa Takao , Hiroshi Ikeda , Hideki Matsumura , Atsushi Masuda , Hironobu Umemoto
- Applicant Address: JP Kanagawa JP Ishikawa
- Assignee: Tokyo Ohka Kogyo Co., Ltd.,Japan Advanced Institute of Science and Technology
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.,Japan Advanced Institute of Science and Technology
- Current Assignee Address: JP Kanagawa JP Ishikawa
- Agency: Carrier, Blackman & Associates P.C.
- Agent Joseph P. Carrier; William D. Blackman
- Priority: JP2005-254382 20050902
- International Application: PCT/JP2006/316409 WO 20060822
- International Announcement: WO2007/029488 WO 20070315
- Main IPC: C23F1/00
- IPC: C23F1/00

Abstract:
An end point detection method in the case where a catalyst arranged in a treatment chamber of a gas phase reaction processing apparatus is heated at high temperature by supplying electric power thereto and the treatment is carried out by cracking a reaction gas by the catalyst heated at high temperature, comprises the steps of supplying the electric power to the catalyst from a constant current source, detecting electric potential difference between both ends of the catalyst, performing primary differentiation of the detected electric potential difference, and determining an end point of the treatment based on obtained primary differential value.
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