Invention Grant
- Patent Title: Controlled polarity group III-nitride films and methods of preparing such films
- Patent Title (中): 控制极性III族氮化物膜及其制备方法
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Application No.: US11382806Application Date: 2006-05-11
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Publication No.: US07815970B2Publication Date: 2010-10-19
- Inventor: Raoul Schlesser , Ramón R. Collazo , Zlatko Sitar
- Applicant: Raoul Schlesser , Ramón R. Collazo , Zlatko Sitar
- Applicant Address: US NC Raleigh
- Assignee: North Carolina State University
- Current Assignee: North Carolina State University
- Current Assignee Address: US NC Raleigh
- Agency: Womble Carlyle Sandridge & Rice, PLLC
- Main IPC: C23C16/34
- IPC: C23C16/34
Abstract:
The present invention provides methods of preparing Group III-nitride films of controlled polarity and substrates coated with such controlled polarity films. In particular, the invention provides substrate preparation steps that optimize the substrate surface for facilitating growth of a Group III-polar film, an N-polar film, or a selectively patterned film with both a Group III-polar portion and an N-polar portion in precise positioning. The methods of the invention are particularly suited for use in CVD methods.
Public/Granted literature
- US20060257626A1 CONTROLLED POLARITY GROUP III-NITRIDE FILMS AND METHODS OF PREPARING SUCH FILMS Public/Granted day:2006-11-16
Information query
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