Invention Grant
US07816752B2 Solid state imaging device and camera comprising a device isolation having a step
有权
固态成像装置和相机包括具有台阶的装置隔离
- Patent Title: Solid state imaging device and camera comprising a device isolation having a step
- Patent Title (中): 固态成像装置和相机包括具有台阶的装置隔离
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Application No.: US11436649Application Date: 2006-05-19
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Publication No.: US07816752B2Publication Date: 2010-10-19
- Inventor: Mitsuyoshi Mori
- Applicant: Mitsuyoshi Mori
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2005-166792 20050607
- Main IPC: H01L33/133
- IPC: H01L33/133
Abstract:
In a solid state imaging device which includes a photodiode in the upper part of a silicon substrate and a MOSFET active region separated from the photodiode by a device isolation region, the width of the device isolation region is smaller in its lower part than in its upper part.
Public/Granted literature
- US20060273359A1 Solid state imaging device, camera, and method for fabricating solid state imaging device Public/Granted day:2006-12-07
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