Invention Grant
US07816758B2 Integrated circuit having laterally dielectrically isolated active regions above an electrically contacted buried material, and method for producing the same 有权
在电接触掩埋材料上方具有侧向介电隔离的有源区的集成电路及其制造方法

  • Patent Title: Integrated circuit having laterally dielectrically isolated active regions above an electrically contacted buried material, and method for producing the same
  • Patent Title (中): 在电接触掩埋材料上方具有侧向介电隔离的有源区的集成电路及其制造方法
  • Application No.: US11491172
    Application Date: 2006-07-24
  • Publication No.: US07816758B2
    Publication Date: 2010-10-19
  • Inventor: Volker Dudek
  • Applicant: Volker Dudek
  • Applicant Address: DE Heilbronn
  • Assignee: Atmel Automotive GmbH
  • Current Assignee: Atmel Automotive GmbH
  • Current Assignee Address: DE Heilbronn
  • Agency: Muncy, Geissler, Olds & Lowe, PLLC
  • Priority: DE102004004512 20040123
  • Main IPC: H01L27/14
  • IPC: H01L27/14
Integrated circuit having laterally dielectrically isolated active regions above an electrically contacted buried material, and method for producing the same
Abstract:
An integrated circuit is disclosed that includes a first layer made of active semiconductor material and extending along a first side of a buried layer, and trench structures, which cut through the layer made of active semiconductor material and have dielectric wall regions, whereby the dielectric wall regions isolate electrically subregions of the layer, made of active semiconductor material in the lateral direction, and whereby the trench structures, furthermore, have first inner regions, which are filled with electrically conductive material and contact the buried layer in an electrically conductive manner. The integrated circuit is notable in that the first wall regions of the trench structures completely cut through the buried layer and the second wall regions of the trench structures extend into the buried layer, without cutting it completely. Furthermore, a method for manufacturing such an integrated circuit is disclosed.
Information query
Patent Agency Ranking
0/0