Invention Grant
US07816955B2 Ramp generator and circuit pattern inspection apparatus using the same ramp generator 有权
使用斜坡发生器的斜坡发生器和电路图案检查装置

Ramp generator and circuit pattern inspection apparatus using the same ramp generator
Abstract:
The present invention provides a ramp generator capable of appropriately setting a rise starting point of an output voltage of a ramp waveform and an output voltage at the time of stable output. A current adjustment unit including a differential pair of transistors and an amplifier constitute a feedback circuit. By controlling the charging/discharging of an integration capacitor by ON/OFF of a discharge current source connected to a common emitter terminal of the current adjustment unit, an output of the ramp waveform outputted from an output terminal disposed at the connection end of the integration capacitor is controlled.
Information query
Patent Agency Ranking
0/0