Invention Grant
US07816955B2 Ramp generator and circuit pattern inspection apparatus using the same ramp generator
有权
使用斜坡发生器的斜坡发生器和电路图案检查装置
- Patent Title: Ramp generator and circuit pattern inspection apparatus using the same ramp generator
- Patent Title (中): 使用斜坡发生器的斜坡发生器和电路图案检查装置
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Application No.: US12044108Application Date: 2008-03-07
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Publication No.: US07816955B2Publication Date: 2010-10-19
- Inventor: Masayoshi Takahashi , Kengo Imagawa , Norio Chujo
- Applicant: Masayoshi Takahashi , Kengo Imagawa , Norio Chujo
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2007-072800 20070320
- Main IPC: H03K4/06
- IPC: H03K4/06

Abstract:
The present invention provides a ramp generator capable of appropriately setting a rise starting point of an output voltage of a ramp waveform and an output voltage at the time of stable output. A current adjustment unit including a differential pair of transistors and an amplifier constitute a feedback circuit. By controlling the charging/discharging of an integration capacitor by ON/OFF of a discharge current source connected to a common emitter terminal of the current adjustment unit, an output of the ramp waveform outputted from an output terminal disposed at the connection end of the integration capacitor is controlled.
Public/Granted literature
- US20080231330A1 RAMP GENERATOR AND CIRCUIT PATTERN INSPECTION APPARATUS USING THE SAME RAMP GENERATOR Public/Granted day:2008-09-25
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