An apparatus for converting MEMS inductive capacitance to digital is provided, for converting the induced analog voltage of MEMS element into digital signal. The apparatus includes an ADC, a reference voltage circuit and a controller. With the integral circuit and the comparator of the ADC and the reference voltages generated by the reference voltage circuit, the apparatus of the present invention uses the switch signals generated by the controller to generate digital signals. The present invention can also be integrated with MEMS element into a single chip to achieve single-chip MEMS.