Invention Grant
US07817288B2 Device and method for measuring profiles of electron beam and laser beam
有权
用于测量电子束和激光束轮廓的装置和方法
- Patent Title: Device and method for measuring profiles of electron beam and laser beam
- Patent Title (中): 用于测量电子束和激光束轮廓的装置和方法
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Application No.: US12162912Application Date: 2007-03-07
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Publication No.: US07817288B2Publication Date: 2010-10-19
- Inventor: Daisuke Ishida , Hiroyuki Nose , Namio Kaneko , Mitsuru Uesaka , Fumito Sakamoto , Katsuhiro Dobashi
- Applicant: Daisuke Ishida , Hiroyuki Nose , Namio Kaneko , Mitsuru Uesaka , Fumito Sakamoto , Katsuhiro Dobashi
- Applicant Address: JP Tokyo JP Tokyo JP Chiba
- Assignee: IHI Corporation,The University of Tokyo,National Institute of Radiological Sciences
- Current Assignee: IHI Corporation,The University of Tokyo,National Institute of Radiological Sciences
- Current Assignee Address: JP Tokyo JP Tokyo JP Chiba
- Agency: Griffin & Szipl, P.C.
- Priority: JP2006-080383 20060323
- International Application: PCT/JP2007/054410 WO 20070307
- International Announcement: WO2007/108320 WO 20070927
- Main IPC: G01B11/14
- IPC: G01B11/14 ; G01B11/02

Abstract:
A device for measuring profiles of an electron beam and a laser beam is provided with a profile measuring device 30 for measuring cross-section profiles of the beams in the vicinity of a collision position where an electron beam 1 and a laser beam 3 are brought into frontal collision, and a moving device 40 for continuously moving the profile measuring device in a predetermined direction which substantially coincides with the axial directions of the beams. Furthermore, based on the cross-section profiles measured by the profile measuring device, the position of the profile measuring device in the predetermined direction, and the oscillation timings of the beams, temporal changes in three-dimensional profiles of the electron beam and the laser beam are created by a profile creating device 50.
Public/Granted literature
- US20090051937A1 Device and method for measuring profiles of electron beam and laser beam Public/Granted day:2009-02-26
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