Invention Grant
- Patent Title: MEMS device with an angular vertical comb actuator
- Patent Title (中): 具有角度垂直梳状执行机构的MEMS器件
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Application No.: US12043202Application Date: 2008-03-06
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Publication No.: US07817331B2Publication Date: 2010-10-19
- Inventor: Abdul Jaleel. K. Moidu
- Applicant: Abdul Jaleel. K. Moidu
- Applicant Address: US CA Milpitas
- Assignee: JDS Uniphase Corporation
- Current Assignee: JDS Uniphase Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Teitelbaum & MacLean
- Agent Neil Teitelbaum; Doug MacLean
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G02B26/08

Abstract:
A vertical comb electro-static actuator for rotating a micro-electro-mechanical micro-mirror device about a tilt axis or rotation. The rotor comb fingers of the comb drive extend from a sub-frame of the micro-mirror, which includes a prestressed layer for bending the rotor comb fingers at an angle to the substrate and mirrored platform, enabling the platform, the hinges, the rotor comb fingers and the stator comb fingers to be formed in the same layer, i.e. the same etching step.
Public/Granted literature
- US20080316577A1 MEMS DEVICE WITH AN ANGULAR VERTICAL COMB ACTUATOR Public/Granted day:2008-12-25
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