Invention Grant
US07817331B2 MEMS device with an angular vertical comb actuator 有权
具有角度垂直梳状执行机构的MEMS器件

MEMS device with an angular vertical comb actuator
Abstract:
A vertical comb electro-static actuator for rotating a micro-electro-mechanical micro-mirror device about a tilt axis or rotation. The rotor comb fingers of the comb drive extend from a sub-frame of the micro-mirror, which includes a prestressed layer for bending the rotor comb fingers at an angle to the substrate and mirrored platform, enabling the platform, the hinges, the rotor comb fingers and the stator comb fingers to be formed in the same layer, i.e. the same etching step.
Public/Granted literature
Information query
Patent Agency Ranking
0/0