Invention Grant
- Patent Title: Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof
- Patent Title (中): 具有集成端耦合波导的蚀刻面半导体光学部件及其制造和使用方法
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Application No.: US12541916Application Date: 2009-08-15
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Publication No.: US07817882B2Publication Date: 2010-10-19
- Inventor: Henry A. Blauvlet , David W. Vernooy , Joel S. Paslaski , Charles I. Grosjean , Hao Lee , Franklin G. Monzon , Katrina H. Nguyen
- Applicant: Henry A. Blauvlet , David W. Vernooy , Joel S. Paslaski , Charles I. Grosjean , Hao Lee , Franklin G. Monzon , Katrina H. Nguyen
- Applicant Address: US CA San Jose
- Assignee: HOYA Corporation USA
- Current Assignee: HOYA Corporation USA
- Current Assignee Address: US CA San Jose
- Agent David S. Alavi
- Main IPC: G02B6/00
- IPC: G02B6/00 ; G02B6/12 ; G02B6/13

Abstract:
An optical apparatus comprises: a semiconductor substrate; a semiconductor optical device integrally formed on the substrate and having an off-normal device end face; and a low-index planar optical waveguide integrally formed on the semiconductor substrate at the device end face. The device and waveguide are non-collinear, and the waveguide is end-coupled at its proximal end to the optical device by refraction at the device end face. The apparatus further includes a reflective coating between the waveguide and substrate, an etched end face curved in the horizontal dimension, or an etched end face with a lower portion that protrudes beneath a proximal portion of the waveguide.
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