Invention Grant
US07817882B2 Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof 有权
具有集成端耦合波导的蚀刻面半导体光学部件及其制造和使用方法

Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof
Abstract:
An optical apparatus comprises: a semiconductor substrate; a semiconductor optical device integrally formed on the substrate and having an off-normal device end face; and a low-index planar optical waveguide integrally formed on the semiconductor substrate at the device end face. The device and waveguide are non-collinear, and the waveguide is end-coupled at its proximal end to the optical device by refraction at the device end face. The apparatus further includes a reflective coating between the waveguide and substrate, an etched end face curved in the horizontal dimension, or an etched end face with a lower portion that protrudes beneath a proximal portion of the waveguide.
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