Invention Grant
US07827864B2 Microelectromechanical gyroscope with suppression of capacitive coupling spurious signals and control method 有权
具有抑制电容耦合寄生信号的微机电陀螺和控制方法

Microelectromechanical gyroscope with suppression of capacitive coupling spurious signals and control method
Abstract:
A microelectromechanical gyroscope having a microstructure with a first mass, which can oscillate according to a first axis, and a second mass constrained to the first mass so as to oscillate according to a second axis in response to a rotation of the microstructure, and a driving device coupled to the microstructure to maintain the first mass in oscillation at a resonance frequency, the driving device provided with a low-pass filter having a passband such that the resonance frequency is in the passband and a disturbance frequency associated with disturbance signals due to coupling between the first mass and the second mass is not in the passband.
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