Invention Grant
- Patent Title: Method for slicing a multiplicity of wafers from a workpiece
- Patent Title (中): 从工件上切割多个晶片的方法
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Application No.: US11953892Application Date: 2007-12-11
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Publication No.: US07827980B2Publication Date: 2010-11-09
- Inventor: Frank Skovgaard-Soerensen , Matthias Mahnke , Thomas Kasinger
- Applicant: Frank Skovgaard-Soerensen , Matthias Mahnke , Thomas Kasinger
- Applicant Address: DE Munich
- Assignee: Siltronic AG
- Current Assignee: Siltronic AG
- Current Assignee Address: DE Munich
- Agency: Brooks Kushman P.C.
- Priority: DE102006058823 20061213
- Main IPC: B28D1/08
- IPC: B28D1/08 ; B24B49/00

Abstract:
A multiplicity of wafers are sliced from a workpiece which has a longitudinal axis and a cross section, the workpiece fastened on a table being fed by a relative movement directed perpendicularly to the longitudinal axis of the workpiece between the table and the wire gang of a wire saw, with a variable forward feed rate through the wire gang formed by a sawing wire moved with an effective speed, the effective speed of the sawing wire being regulated as a function of the forward feed rate and the workpiece cross section so as to result in uniform wear of the sawing wire.
Public/Granted literature
- US20080141994A1 Method For Slicing A Multiplicity Of Wafers From A Workpiece Public/Granted day:2008-06-19
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