Invention Grant
- Patent Title: Developing apparatus, developing method, coating and developing system and storage medium
- Patent Title (中): 开发设备,开发方法,涂层开发系统和存储介质
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Application No.: US12105701Application Date: 2008-04-18
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Publication No.: US07828488B2Publication Date: 2010-11-09
- Inventor: Nobuaki Matsuoka
- Applicant: Nobuaki Matsuoka
- Applicant Address: JP Tokyo-To
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo-To
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2007-119506 20070427
- Main IPC: G03D5/00
- IPC: G03D5/00

Abstract:
A developing apparatus includes two rotating members respectively having parallel horizontal axes of rotation and disposed longitudinally opposite to each other, a carrying passage forming mechanism extended between the rotating members to form a carrying passage, and capable of moving along an orbital path to carry a wafer supported thereon along the carrying passage, a sending-in transfer unit disposed at the upstream end of the carrying passage, a sending-out transfer unit disposed at the downstream end of the carrying passage, a developer pouring nozzle for pouring a developer onto the wafer, a cleaning nozzle for pouring a cleaning liquid onto the wafer, and a gas nozzle for blowing a gas against the wafer. The developer pouring nozzle, the cleaning nozzle and the gas nozzle are arranged in that order in a direction in which the wafer is carried along the carrying passage.
Public/Granted literature
- US20080267619A1 DEVELOPING APPARATUS, DEVELOPING METHOD, COATING AND DEVELOPING SYSTEM AND STORAGE MEDIUM Public/Granted day:2008-10-30
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