Invention Grant
US07828946B2 Arc evaporator with a powerful magnetic guide for targets having a large surface area
失效
电弧蒸发器,具有强大的导磁板,具有较大的表面积
- Patent Title: Arc evaporator with a powerful magnetic guide for targets having a large surface area
- Patent Title (中): 电弧蒸发器,具有强大的导磁板,具有较大的表面积
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Application No.: US11473440Application Date: 2006-06-23
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Publication No.: US07828946B2Publication Date: 2010-11-09
- Inventor: Josu Goikoetxea Larrinaga
- Applicant: Josu Goikoetxea Larrinaga
- Applicant Address: ES Eibar
- Assignee: Fundacion Tekniker
- Current Assignee: Fundacion Tekniker
- Current Assignee Address: ES Eibar
- Agency: Michael Best & Friedrich LLP
- Main IPC: C23C14/32
- IPC: C23C14/32

Abstract:
A magnetic guide is presented that controls an electric arc between an anode and a cathode, which may be a target, over the whole cathode surface. The magnetic guide may be included in an arc evaporator and may include a first magnetic system having a group of permanent magnets located on the periphery of the evaporator or target, so that magnetization is perpendicular to the surface of the target. The magnetic guide may also include a second magnetic system that includes an electromagnet located at the rear of the target housed in an electrically insulating body at a distance from the target, with at least one of its magnetic poles parallel to the surface of the target, so that the combined action of the two magnetic systems provides uniform use or consumption of the target.
Public/Granted literature
- US20060237309A1 Arc evaporator with a powerful magnetic guide for targets having a large surface area Public/Granted day:2006-10-26
Information query
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