Invention Grant
- Patent Title: Wafer support apparatus for electroplating process and method for using the same
- Patent Title (中): 用于电镀工艺的晶片支撑装置及其使用方法
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Application No.: US12490239Application Date: 2009-06-23
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Publication No.: US07828951B2Publication Date: 2010-11-09
- Inventor: Carl Woods
- Applicant: Carl Woods
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla & Gencarella, LLP
- Main IPC: H01L21/288
- IPC: H01L21/288 ; H01L21/445

Abstract:
A multi-layered wafer support apparatus is provided for performing an electroplating process on a semiconductor wafer (“wafer”). The multi-layered wafer support apparatus includes a bottom film layer and a top film layer. The bottom film layer includes a wafer placement area and a sacrificial anode surrounding the wafer placement area. The top film layer is defined to be placed over the bottom film layer. The top film layer includes an open region to be positioned over a surface of the wafer to be processed, i.e., electroplated. The top film layer provides a liquid seal between the top film layer and the wafer, about a periphery of the open region. The top film layer further includes first and second electrical circuits that are each defined to electrically contact a peripheral top surface of the wafer at diametrically opposed locations about the wafer.
Public/Granted literature
- US20090260992A1 Wafer Support Apparatus for Electroplating Process and Method for Using the Same Public/Granted day:2009-10-22
Information query
IPC分类: