Invention Grant
- Patent Title: Method of producing thin film magnetic head
- Patent Title (中): 制造薄膜磁头的方法
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Application No.: US11892773Application Date: 2007-08-27
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Publication No.: US07828985B2Publication Date: 2010-11-09
- Inventor: Yuji Ito , Hiraku Hirabayashi , Yoshiyuki Mizoguchi , Nobuya Oyama
- Applicant: Yuji Ito , Hiraku Hirabayashi , Yoshiyuki Mizoguchi , Nobuya Oyama
- Applicant Address: JP Tokyo
- Assignee: TDK Corporation
- Current Assignee: TDK Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2006-281715 20061016
- Main IPC: C23F1/00
- IPC: C23F1/00 ; B44C1/22 ; H01L21/00 ; H01L21/302

Abstract:
A method of producing a thin film magnetic head includes the steps of: forming a second lower magnetic pole layer in a part on a first lower magnetic pole layer; forming, over the entire wafer surface, an insulating layer so as to be thicker than the thickness of the second lower magnetic pole layer in the stacking direction, the insulating layer being less likely to be etched than the second lower magnetic pole layer; carrying out a planarizing process by CMP on the entire wafer surface until the second lower magnetic pole layer is exposed; forming a concave portion including the second lower magnetic pole layer and the insulating layer by ion beam etching on the entire wafer surface; forming a recording gap layer over the entire wafer surface; and forming a first upper magnetic pole layer in the upper magnetic pole layer so as to fill the concave portion.
Public/Granted literature
- US20080087630A1 Method of producing thin film magnetic head Public/Granted day:2008-04-17
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