Invention Grant
- Patent Title: Image sensor and method for manufacturing the same
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Application No.: US12654489Application Date: 2009-12-22
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Publication No.: US07829367B2Publication Date: 2010-11-09
- Inventor: Sang Il Hwang , Jeong Yel Jang
- Applicant: Sang Il Hwang , Jeong Yel Jang
- Applicant Address: KR Seoul
- Assignee: Dongbu Hitek Co., Ltd.
- Current Assignee: Dongbu Hitek Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: KR10-2006-0068977 20060724
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/00

Abstract:
An image sensor and a method for manufacturing the same are provided. In the method, a photoresist is formed on a substrate including a photodiode region and a gate electrode opposite to the photodiode region on the basis of the gate electrode. An oxide layer is formed to a specific thickness on both the photodiode region and a part of the gate electrode. The photoresist is removed from the substrate and cleaned. A first oxide film is formed on the substrate, the gate electrode, and the oxide layer remaining on the photodiode region. A nitride film is formed on the first oxide film. And a second oxide film is formed on the nitride film. Blank etching is performed on the first oxide film, the nitride film, and the second oxide film to form a spacer at the side of the gate electrode.
Public/Granted literature
- US20100173442A1 Image sensor and method for manufacturing the same Public/Granted day:2010-07-08
Information query
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