Invention Grant
- Patent Title: Methods of forming openings
- Patent Title (中): 形成开口的方法
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Application No.: US11777055Application Date: 2007-07-12
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Publication No.: US07829369B2Publication Date: 2010-11-09
- Inventor: Daniel Knudsen , James Chapman
- Applicant: Daniel Knudsen , James Chapman
- Applicant Address: KY George Town
- Assignee: Aptina Imaging Corporation
- Current Assignee: Aptina Imaging Corporation
- Current Assignee Address: KY George Town
- Agent David C. Kellogg
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Some embodiments include methods of forming openings in which a metal-containing structure is formed over a region of a semiconductor substrate. A patterned metal-containing material is formed over the metal-containing structure, with the metal-containing material having a gap extending therethrough. An entirety of the metal-containing structure is removed through the gap to leave an opening over the region of the semiconductor substrate. The region of the semiconductor substrate may comprise CMOS sensors, and one or both of filter material and microlens material may be formed within the opening.
Public/Granted literature
- US20090017575A1 Methods Of Forming Openings Public/Granted day:2009-01-15
Information query
IPC分类: