Invention Grant
- Patent Title: Solder pillar bumping and a method of making the same
- Patent Title (中): 焊柱碰撞及其制作方法
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Application No.: US11589986Application Date: 2006-10-31
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Publication No.: US07829380B2Publication Date: 2010-11-09
- Inventor: Roland Irsigler , Harry Hedler
- Applicant: Roland Irsigler , Harry Hedler
- Applicant Address: DE Munich
- Assignee: Qimonda AG
- Current Assignee: Qimonda AG
- Current Assignee Address: DE Munich
- Agency: Patterson & Sheridan, LLP
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of forming flip chip bumps includes forming a plurality of metallization pads on a die. In another step, a structured layer having pores is formed on the die and metallization pads where the pads on the die are exposed through the pores. In yet another step, the die is transferred to a chamber having a liquid metal bath. In another step, a first pressure is created within the chamber followed by dipping the die in the liquid metal bath. In another step, a second pressure is created within the chamber such that liquid metal fills portions of the pores thereby forming metal pillars connected to the pads.
Public/Granted literature
- US20080099925A1 Solder pillar bumping and a method of making the same Public/Granted day:2008-05-01
Information query
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