Invention Grant
US07829384B2 Semiconductor device and method of laser-marking wafers with tape applied to its active surface
有权
用施加到其活性表面上的带激光标记晶片的半导体器件和方法
- Patent Title: Semiconductor device and method of laser-marking wafers with tape applied to its active surface
- Patent Title (中): 用施加到其活性表面上的带激光标记晶片的半导体器件和方法
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Application No.: US12205695Application Date: 2008-09-05
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Publication No.: US07829384B2Publication Date: 2010-11-09
- Inventor: Glenn Omandam , Sheila M. Alvarez , Ma. Shirley Asoy
- Applicant: Glenn Omandam , Sheila M. Alvarez , Ma. Shirley Asoy
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC, Ltd.
- Current Assignee: STATS ChipPAC, Ltd.
- Current Assignee Address: SG Singapore
- Agent Robert D. Atkins
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of laser-marking a semiconductor device involves providing a semiconductor wafer having a plurality of solder bumps formed on contact pads disposed on its active surface. The solder bumps have a diameter of about 250-280 μm. A backgrinding tape is applied over the solder bumps. The tape is translucent to optical images. A backside of the semiconductor wafer, opposite the active surface, undergoes grinding to reduce wafer thickness. The backside of the semiconductor wafer is laser-marked while the tape remains applied to the solder bumps. The laser-marking system including an optical recognition device, control system, and laser. The optical recognition device reads patterns on the active surface through the tape to control the laser. The tape reduces wafer warpage during laser-marking to about 0.3-0.5 mm. The tape is removed after laser-marking the backside of the semiconductor wafer.
Public/Granted literature
- US20090081830A1 Semiconductor Device and Method of Laser-Marking Wafers with Tape Applied to its Active Surface Public/Granted day:2009-03-26
Information query
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