Invention Grant
US07829393B2 Copper gate electrode of liquid crystal display device and method of fabricating the same 有权
液晶显示装置的铜栅电极及其制造方法

Copper gate electrode of liquid crystal display device and method of fabricating the same
Abstract:
A copper gate electrode, applied in a thin-film-transistor liquid crystal display (LCD) device, at least comprises a patterned copper layer formed on a glass substrate, and a barrier layer formed on the patterned copper layer. The barrier layer comprises at least one of nitrogen and phosphorus, or comprises an alloy formularized as M1M2R wherein M1 is cobalt (Co) or molybdenum (Mo), M2 is tungsten (W), molybdenum (Mo), rhenium (Re) or vanadium (V), and R is boron (B) or phosphorus (P).
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