Invention Grant
- Patent Title: Copper gate electrode of liquid crystal display device and method of fabricating the same
- Patent Title (中): 液晶显示装置的铜栅电极及其制造方法
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Application No.: US12366693Application Date: 2009-02-06
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Publication No.: US07829393B2Publication Date: 2010-11-09
- Inventor: Yu-Wei Liu , Wen-Ching Tsai , Kuo-Yu Huang , Hui-Fen Lin
- Applicant: Yu-Wei Liu , Wen-Ching Tsai , Kuo-Yu Huang , Hui-Fen Lin
- Applicant Address: TW Hsin-Chu
- Assignee: Au Optronics Corp.
- Current Assignee: Au Optronics Corp.
- Current Assignee Address: TW Hsin-Chu
- Agency: Bacon & Thomas, PLLC
- Priority: TW93141259A 20041229
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A copper gate electrode, applied in a thin-film-transistor liquid crystal display (LCD) device, at least comprises a patterned copper layer formed on a glass substrate, and a barrier layer formed on the patterned copper layer. The barrier layer comprises at least one of nitrogen and phosphorus, or comprises an alloy formularized as M1M2R wherein M1 is cobalt (Co) or molybdenum (Mo), M2 is tungsten (W), molybdenum (Mo), rhenium (Re) or vanadium (V), and R is boron (B) or phosphorus (P).
Public/Granted literature
- US20090142923A1 COPPER GATE ELECTRODE OF LIQUID CRYSTAL DISPLAY DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2009-06-04
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