Invention Grant
- Patent Title: Display device and manufacturing method of the same
- Patent Title (中): 显示装置及其制造方法相同
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Application No.: US12017384Application Date: 2008-01-22
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Publication No.: US07829395B2Publication Date: 2010-11-09
- Inventor: Miyo Ishii , Junichi Uehara , Kunihiko Watanabe
- Applicant: Miyo Ishii , Junichi Uehara , Kunihiko Watanabe
- Applicant Address: JP Chiba-Ken JP Chiba-Ken
- Assignee: Hitachi Displays, Ltd.,IPS Alpha Technology, Ltd.
- Current Assignee: Hitachi Displays, Ltd.,IPS Alpha Technology, Ltd.
- Current Assignee Address: JP Chiba-Ken JP Chiba-Ken
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2007-012114 20070123
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
The present invention provides a method for manufacturing a display device which can reliably form electrodes in a thin film transistor. A method for manufacturing a display device includes the steps of: preparing a substrate having a sequentially stacked body formed of a gate signal line, an insulation film, a semiconductor layer and a conductor layer; forming a drain electrode and a source electrode of a thin film transistor at least in a region where the thin film transistor is formed in a pattern in which one of the drain electrode and the source electrode is formed in an approximately U shape having an open-ended one end side and a connecting portion on another end side such that one electrode surrounds a distal end portion of another electrode as viewed in a plan view and a projecting portion is formed on a side of the connecting portion opposite to another electrode, wherein the respective electrodes are formed by selectively etching the conductor layer using a photoresist film as a mask; and etching the semiconductor layer using a deformed photoresist film which is formed by directly reflowing the photoresist film as a mask.
Public/Granted literature
- US20080173873A1 DISPLAY DEVICE AND MANUFACTURING METHOD OF THE SAME Public/Granted day:2008-07-24
Information query
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