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US07829402B2 MOSFET devices and methods of making 有权
MOSFET器件及其制造方法

MOSFET devices and methods of making
Abstract:
A MOSFET device and a method for fabricating MOSFET devices are disclosed. The method includes providing a semiconductor device structure including a semiconductor device layer of a first conductivity type, and ion implanting a well structure of a second conductivity type in the semiconductor device layer, where the ion implanting includes providing a dopant concentration profile in a single mask implant sequence.
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