Invention Grant
US07829407B2 Method of fabricating a stressed MOSFET by bending SOI region
有权
通过弯曲SOI区域制造应力MOSFET的方法
- Patent Title: Method of fabricating a stressed MOSFET by bending SOI region
- Patent Title (中): 通过弯曲SOI区域制造应力MOSFET的方法
-
Application No.: US11561488Application Date: 2006-11-20
-
Publication No.: US07829407B2Publication Date: 2010-11-09
- Inventor: Brent A. Anderson , Andres Bryant , Edward J. Nowak
- Applicant: Brent A. Anderson , Andres Bryant , Edward J. Nowak
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Richard Kotulak
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L21/84 ; H01L29/78

Abstract:
A semiconductor device including semiconductor material having a bend and a trench feature formed at the bend, and a gate structure at least partially disposed in the trench feature. A method of fabricating a semiconductor structure including forming a semiconductor material with a trench feature over a layer, forming a gate structure at least partially in the trench feature, and bending the semiconductor material such that stress is induced in the semiconductor material in an inversion channel region of the gate structure.
Public/Granted literature
- US20080116517A1 Dual stress device and method Public/Granted day:2008-05-22
Information query
IPC分类: