Invention Grant
- Patent Title: Semiconductor component and method of manufacture
- Patent Title (中): 半导体元件及制造方法
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Application No.: US12549100Application Date: 2009-08-27
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Publication No.: US07829426B2Publication Date: 2010-11-09
- Inventor: Peter A. Burke , Sallie Hose , Sudhama C. Shastri
- Applicant: Peter A. Burke , Sallie Hose , Sudhama C. Shastri
- Applicant Address: US AZ Phoenix
- Assignee: Semiconductor Components Industries, L.L.C.
- Current Assignee: Semiconductor Components Industries, L.L.C.
- Current Assignee Address: US AZ Phoenix
- Agent Rennie William Dover
- Main IPC: H01L21/02
- IPC: H01L21/02

Abstract:
A semiconductor component that includes an integrated passive device and method for manufacturing the semiconductor component. Vertically integrated passive devices are manufactured above a substrate. In accordance with one embodiment, a resistor is manufactured in a first level above a substrate, a capacitor is manufactured in a second level that is vertically above the first level, and a copper inductor is manufactured in a third level that is vertically above the second level. The capacitor has aluminum plates. In accordance with another embodiment, a resistor is manufactured in a first level above a substrate, a copper inductor is manufactured in a second level that is vertically above the first level, and a capacitor is manufactured in a third level that is vertically above the second level. The capacitor may have aluminum plates or a portion of the copper inductor may serve as one of its plates.
Public/Granted literature
- US20090315142A1 Semiconductor component and method of manufacture Public/Granted day:2009-12-24
Information query
IPC分类: