Invention Grant
- Patent Title: Digital x-ray detector and fabrication method thereof
- Patent Title (中): 数字X射线检测器及其制造方法
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Application No.: US12289466Application Date: 2008-10-28
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Publication No.: US07829861B2Publication Date: 2010-11-09
- Inventor: Ju-Han Kim
- Applicant: Ju-Han Kim
- Applicant Address: KR Seoul
- Assignee: Display Co., Ltd.
- Current Assignee: Display Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: McKenna Long & Aldridge LLP
- Priority: KR10-2007-0127192 20071207
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A digital x-ray detector and its fabrication method are disclosed to strengthen an electrical connection between an upper electrode and a lower by employing a multi-contact hole structure and obtaining reliability of a contact hole by electrically connecting the side of the lower line and the upper electrode. A semiconductor layer is inserted at a lower portion of the contact hole to prevent damage of a gate insulating layer possibly caused by an overetch to thus reduce a defective contact.
Public/Granted literature
- US20090146147A1 Digital x-ray detector and fabrication method thereof Public/Granted day:2009-06-11
Information query
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