Invention Grant
US07829861B2 Digital x-ray detector and fabrication method thereof 有权
数字X射线检测器及其制造方法

Digital x-ray detector and fabrication method thereof
Abstract:
A digital x-ray detector and its fabrication method are disclosed to strengthen an electrical connection between an upper electrode and a lower by employing a multi-contact hole structure and obtaining reliability of a contact hole by electrically connecting the side of the lower line and the upper electrode. A semiconductor layer is inserted at a lower portion of the contact hole to prevent damage of a gate insulating layer possibly caused by an overetch to thus reduce a defective contact.
Public/Granted literature
Information query
Patent Agency Ranking
0/0