Invention Grant
US07829877B2 Memory structure with a programmable resistive element and its manufacturing process
有权
具有可编程电阻元件的存储器结构及其制造工艺
- Patent Title: Memory structure with a programmable resistive element and its manufacturing process
- Patent Title (中): 具有可编程电阻元件的存储器结构及其制造工艺
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Application No.: US12425223Application Date: 2009-04-16
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Publication No.: US07829877B2Publication Date: 2010-11-09
- Inventor: Pascale Mazoyer , Germain Bossu
- Applicant: Pascale Mazoyer , Germain Bossu
- Applicant Address: FR Montrouge
- Assignee: STMicroelectronics S.A.
- Current Assignee: STMicroelectronics S.A.
- Current Assignee Address: FR Montrouge
- Agency: Seed IP Law Group PLLC
- Agent Lisa K. Jorgenson; Robert Iannucci
- Priority: FR0802106 20080416
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
A memory structure has an access transistor connected in series with a programmable resistive element, wherein the programmable resistive element comprises on a semiconductor substrate; an insulated layer with a cavity comprising: a first layer lining the lateral surfaces and the bottom of the said cavity and impermeable to the diffusion of metal; a second layer made of porous material on the said first layer; a third layer of metallic material allowing to realize a contact electrode susceptible to spread within the said formed porous material of the second layer. Diffusion of metallic ions within the said second layer is controlled by the joint action of an electric field and temperature. A manufacturing process is also described.
Public/Granted literature
- US20090267046A1 MEMORY STRUCTURE WITH A PROGRAMMABLE RESISTIVE ELEMENT AND ITS MANUFACTURING PROCESS Public/Granted day:2009-10-29
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