Invention Grant
US07829931B2 Nonvolatile memory devices having control electrodes configured to inhibit parasitic coupling capacitance
有权
具有配置成抑制寄生耦合电容的控制电极的非易失性存储器件
- Patent Title: Nonvolatile memory devices having control electrodes configured to inhibit parasitic coupling capacitance
- Patent Title (中): 具有配置成抑制寄生耦合电容的控制电极的非易失性存储器件
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Application No.: US11670526Application Date: 2007-02-02
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Publication No.: US07829931B2Publication Date: 2010-11-09
- Inventor: Bong-Tae Park , Jeong-Hyuk Choi
- Applicant: Bong-Tae Park , Jeong-Hyuk Choi
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec
- Priority: KR10-2006-0101966 20061019
- Main IPC: H01L27/105
- IPC: H01L27/105

Abstract:
Non-volatile memory devices include a substrate with first and second semiconductor active regions therein. These active regions are separated from each other by a trench isolation region, which has a recess therein that extends along its length. First and second floating gate electrodes are provided. These first and second floating gate electrodes extend on the first and second semiconductor active regions, respectively. A control electrode is provided that extends between the first and second floating gate electrodes and into the recess in the trench isolation region. The recess in the trench isolation region is sufficiently deep so that the control electrode, which extends into the recess, operates to reduce (e.g., block) a parasitic coupling capacitance between the first and second floating gate electrodes.
Public/Granted literature
- US20080093653A1 Nonvolatile Memory Devices and Methods for Forming Same Public/Granted day:2008-04-24
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