Invention Grant
US07829947B2 Bottom-drain LDMOS power MOSFET structure having a top drain strap
有权
底部漏极LDMOS功率MOSFET结构,具有顶部排水带
- Patent Title: Bottom-drain LDMOS power MOSFET structure having a top drain strap
- Patent Title (中): 底部漏极LDMOS功率MOSFET结构,具有顶部排水带
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Application No.: US12406048Application Date: 2009-03-17
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Publication No.: US07829947B2Publication Date: 2010-11-09
- Inventor: François Hébert
- Applicant: François Hébert
- Applicant Address: US CA Sunnyvale
- Assignee: Alpha & Omega Semiconductor Incorporated
- Current Assignee: Alpha & Omega Semiconductor Incorporated
- Current Assignee Address: US CA Sunnyvale
- Agency: JDI Patent
- Agent Joshua D. Isenberg
- Main IPC: H01L29/417
- IPC: H01L29/417 ; H01L29/78

Abstract:
Lateral DMOS devices having improved drain contact structures and methods for making the devices are disclosed. A semiconductor device comprises a semiconductor substrate; an epitaxial layer on top of the substrate; a drift region at a top surface of the epitaxial layer; a source region at a top surface of the epitaxial layer; a channel region between the source and drift regions; a gate positioned over a gate dielectric on top of the channel region; and a drain contact trench that electrically connects the drift layer and substrate. The contact trench includes a trench formed vertically from the drift region, through the epitaxial layer to the substrate and filled with an electrically conductive drain plug; electrically insulating spacers along sidewalls of the trench; and an electrically conductive drain strap on top of the drain contact trench that electrically connects the drain contact trench to the drift region.
Public/Granted literature
- US20100237416A1 BOTTOM-DRAIN LDMOS POWER MOSFET STRUCTURE HAVING A TOP DRAIN STRAP Public/Granted day:2010-09-23
Information query
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