Invention Grant
- Patent Title: Magnetic sensor, method of manufacturing the same, and electronic device
- Patent Title (中): 磁传感器,制造方法及电子装置
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Application No.: US11715935Application Date: 2007-03-09
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Publication No.: US07830143B2Publication Date: 2010-11-09
- Inventor: Tsutomu Mitsuzuka
- Applicant: Tsutomu Mitsuzuka
- Applicant Address: JP Tokyo
- Assignee: NEC Corporation
- Current Assignee: NEC Corporation
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JP2006-065336 20060310
- Main IPC: G01R33/09
- IPC: G01R33/09 ; H01L43/08 ; G01B7/14

Abstract:
A magnetic sensor have a magnetic field sensing portion having an alloy metal thin film including Ni, Fe and Co as main components and having a magneto-resistance effect, and detects two or more magnetic fields, at least one of which magnetic fields to be detected is 2.5 mT or more, and among which magnetic fields to be detected the minimum magnetic field and the maximum magnetic field are separated by 0.5 mT or more. The alloy metal thin film has an absolute value of magneto-striction constant of 1.5×10−5 or less, an anisotropic magnetic field of 8 Oe or more as well as 16 Oe or less, and a magnetic resistance change ratio of 2.5% or more. The alloy metal thin film is within a composition range which concurrently fulfills the following relations: 21x+19y≦1869, 5x+28y≧546, y≦11, and x+y≧85, where the composition ratio of Ni is represented by x % by weight, while the composition ratio of Co is represented by y % by weight.
Public/Granted literature
- US20070210788A1 Magnetic sensor, method of manufacturing the same, and electronic device Public/Granted day:2007-09-13
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