Invention Grant
- Patent Title: Precision abrasive machining of work piece surfaces
- Patent Title (中): 工件表面的精密磨削加工
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Application No.: US11998691Application Date: 2007-11-30
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Publication No.: US07831327B2Publication Date: 2010-11-09
- Inventor: Mark Andrew Stocker
- Applicant: Mark Andrew Stocker
- Applicant Address: US NY Corning
- Assignee: Corning Incorporated
- Current Assignee: Corning Incorporated
- Current Assignee Address: US NY Corning
- Agent Bruce P. Watson; Matthew Dernier, Esq.
- Main IPC: G06F19/00
- IPC: G06F19/00 ; H01L21/461 ; B24B49/00 ; B24B5/00

Abstract:
The spacing between an abrasive type surface polishing tool and the surface of the work piece that is being polished is controlled dynamically so that variations in the area of the abrasive pad in contact with the surface of the work piece compensated, thereby eliminating size variations in this contact area and the accompanying variations in material removal that produce surface height fluctuations.
Public/Granted literature
- US20080132148A1 Precision abrasive machining of work piece surfaces Public/Granted day:2008-06-05
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