Invention Grant
- Patent Title: Phase change material and methods of forming the phase change material
- Patent Title (中): 相变材料和形成相变材料的方法
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Application No.: US12204510Application Date: 2008-09-04
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Publication No.: US07834342B2Publication Date: 2010-11-16
- Inventor: Keith R. Hampton
- Applicant: Keith R. Hampton
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L47/00
- IPC: H01L47/00

Abstract:
A phase change material including a high adhesion phase change material formed on a dielectric material and a low adhesion phase change material formed on the high adhesion phase change material. The high adhesion phase change material includes a greater amount of at least one of nitrogen and oxygen than the low adhesion phase change material. The phase change material is produced by forming a first chalcogenide compound material including an amount of at least one of nitrogen and oxygen on the dielectric material and forming a second chalcogenide compound including a lower percentage of at least one of nitrogen and oxygen on the first chalcogenide compound material. A phase change random access memory device, and a semiconductor structure are also disclosed.
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