Invention Grant
- Patent Title: Device made of single-crystal silicon
- Patent Title (中): 单晶硅器件
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Application No.: US12215655Application Date: 2008-06-27
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Publication No.: US07834452B2Publication Date: 2010-11-16
- Inventor: Arnd Kaelberer , Helmut Baumann , Roland Scheuerer , Heribert Weber
- Applicant: Arnd Kaelberer , Helmut Baumann , Roland Scheuerer , Heribert Weber
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102007031549 20070706
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A device made of single-crystal silicon having a first side, a second side which is situated opposite to the first side, and a third side which extends from the first side to the second side, the first side and the second side each extending in a 100 plane of the single-crystal silicon, the third side extending in a first area in a 111 plane of the single-crystal silicon. The third side extends in a second area in a 110 plane of the single-crystal silicon. Furthermore, a production method for producing a device made of single-crystal silicon is described.
Public/Granted literature
- US20090008749A1 Device made of single-crystal silicon Public/Granted day:2009-01-08
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