Invention Grant
- Patent Title: Projection exposure apparatus, projection exposure method and projection objective
- Patent Title (中): 投影曝光装置,投影曝光方法和投影物镜
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Application No.: US11747630Application Date: 2007-05-11
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Publication No.: US07834981B2Publication Date: 2010-11-16
- Inventor: Hans-Juergen Rostalski , Heiko Feldmann , Wilhelm Ulrich
- Applicant: Hans-Juergen Rostalski , Heiko Feldmann , Wilhelm Ulrich
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT AG
- Current Assignee: Carl Zeiss SMT AG
- Current Assignee Address: DE Oberkochen
- Agency: Sughrue Mion, PLLC
- Priority: DE102006022958 20060511
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03B27/42

Abstract:
A projection exposure apparatus for the exposure of a radiation-sensitive substrate arranged in the region of an image surface of a projection objective with at least one image of a pattern of a mask that is arranged in the region of an object surface of the projection objective has a light source for emitting ultraviolet light from a wavelength band having a bandwidth Δλ>10 pm around a central operating wavelength λ>200 nm; an illumination system for receiving the light from the light source and for directing illumination radiation onto the pattern of the mask; and a projection objective for the imaging of the structure of the mask onto a light-sensitive substrate. The projection objective is a catadioptric projection objective having at least one concave mirror arranged in a region of a pupil surface of the projection objective, and a negative group having at least one negative lens arranged in direct proximity to the concave mirror in a region near the pupil surface, where a marginal ray height (MRH) of the imaging is greater than a chief ray height (CRH).
Public/Granted literature
- US20080117400A1 PROJECTION EXPOSURE APPARATUS, PROJECTION EXPOSURE METHOD AND PROJECTION OBJECTIVE Public/Granted day:2008-05-22
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