Invention Grant
US07838794B2 Laser-based method and system for removing one or more target link structures
有权
用于去除一个或多个目标链路结构的基于激光的方法和系统
- Patent Title: Laser-based method and system for removing one or more target link structures
- Patent Title (中): 用于去除一个或多个目标链路结构的基于激光的方法和系统
-
Application No.: US11700386Application Date: 2007-01-31
-
Publication No.: US07838794B2Publication Date: 2010-11-23
- Inventor: Bo Gu , Donald V. Smart , James J. Cordingley , Joohan Lee , Donald J. Svetkoff , Shepard D. Johnson , Jonathan S. Ehrmann
- Applicant: Bo Gu , Donald V. Smart , James J. Cordingley , Joohan Lee , Donald J. Svetkoff , Shepard D. Johnson , Jonathan S. Ehrmann
- Applicant Address: US MA Bedford
- Assignee: GSI Group Corporation
- Current Assignee: GSI Group Corporation
- Current Assignee Address: US MA Bedford
- Agency: Brooks Kushman P.C.
- Main IPC: B23K26/40
- IPC: B23K26/40 ; H01L21/44

Abstract:
Laser-based methods and systems for removing one or more target link structures of a circuit fabricated on a substrate includes generating a pulsed laser output at a predetermined wavelength less than an absorption edge of the substrate are provided. The laser output includes at least one pulse having a pulse duration in the range of about 10 picoseconds to less than 1 nanosecond, the pulse duration being within a thermal laser processing range. The method also includes delivering and focusing the laser output onto the target link structure. The focused laser output has sufficient power density at a location within the target link structure to reduce the reflectivity of the target link structure and efficiently couple the focused laser output into the target link structure to remove the target link structure without damaging the substrate.
Public/Granted literature
- US20070199927A1 Laser-based method and system for removing one or more target link structures Public/Granted day:2007-08-30
Information query
IPC分类: