Invention Grant
US07838967B2 Semiconductor chip having TSV (through silicon via) and stacked assembly including the chips
有权
具有TSV(通过硅通孔)和包括芯片的堆叠组件的半导体芯片
- Patent Title: Semiconductor chip having TSV (through silicon via) and stacked assembly including the chips
- Patent Title (中): 具有TSV(通过硅通孔)和包括芯片的堆叠组件的半导体芯片
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Application No.: US12108903Application Date: 2008-04-24
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Publication No.: US07838967B2Publication Date: 2010-11-23
- Inventor: Ming-Yao Chen
- Applicant: Ming-Yao Chen
- Applicant Address: TW Hsinchu
- Assignee: Powertech Technology Inc.
- Current Assignee: Powertech Technology Inc.
- Current Assignee Address: TW Hsinchu
- Agency: Muncy, Geissler, Olds & Lowe, PLLC
- Main IPC: H01L23/488
- IPC: H01L23/488

Abstract:
A semiconductor chip having through silicon vias (TSV) and a stacked assembly including the chip are revealed. The chip has a plurality of first and second bonding pads disposed on two opposing surfaces of a semiconductor substrate respectively. Through hole vertically penetrate through the semiconductor substrate and the first and second bonding pads. By forming first extruded ring, the first bonding pad has a first contact surface located between the first extruded ring and the through hole. By forming second extruded ring, the second bonding pad has a second contact surface located outside and adjacent to the second extruded rings to encircle the second extruded ring. The second extruded ring has a proper dimension to fit in the first extruded ring. Accordingly, a plurality of semiconductor chip can be stacked each other with accurate alignment without shifting to effectively reduce the stacked assembly height, moreover, chip stacking processes are accomplished by vertically stacking a plurality of chips first then filling conductive material into the through holes without electrical short between the adjacent bonding pads due to overflow of conductive material to meet the fine-pitch requirements of TSV. The process flow for the stacked assembly is simplified with higher production yields.
Public/Granted literature
- US20090267194A1 SEMICONDUCTOR CHIP HAVING TSV (THROUGH SILICON VIA) AND STACKED ASSEMBLY INCLUDING THE CHIPS Public/Granted day:2009-10-29
Information query
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