Invention Grant
US07839485B2 Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method
有权
移动体驱动方法，移动体驱动系统，图案形成方法，图案形成装置，曝光方法，曝光装置和装置制造方法
- Patent Title: Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method
- Patent Title (中): 移动体驱动方法，移动体驱动系统，图案形成方法，图案形成装置，曝光方法，曝光装置和装置制造方法
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Application No.: US11655082Application Date: 2007-01-19
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Publication No.: US07839485B2Publication Date: 2010-11-23
- Inventor: Yuichi Shibazaki
- Applicant: Yuichi Shibazaki
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2006-011506 20060119; JP2006-044599 20060221; JP2006-236878 20060831
- Main IPC: G03B27/32
- IPC: G03B27/32 ; G01B7/14 ; G01B9/02 ; G01C25/00
Abstract:
Positional information of a movable body in a Y-axis direction is measured using an interferometer and an encoder whose short-term stability of measurement values excels when compared with the interferometer, and based on the measurement results, a predetermined calibration operation for obtaining correction information for correcting measurement values of the encoder is performed. Accordingly, by using measurement values of the interferometer, correction information for correcting the measurement values of the encoder whose short-term stability of the measurement values excels the interferometer is obtained. Then, based on the measurement values of the encoder and the correction information, the movable body is driven in the Y-axis direction with good precision.
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