Invention Grant
- Patent Title: Methods and apparatus for generating a library of spectra
- Patent Title (中): 用于生成光谱库的方法和装置
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Application No.: US12059435Application Date: 2008-03-31
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Publication No.: US07840375B2Publication Date: 2010-11-23
- Inventor: Abraham Ravid , Boguslaw A. Swedek , Dominic J. Benvegnu , Jeffrey Drue David , Jun Qian , Sidney P. Huey , Ingemar Carlsson , Lakshmanan Karuppiah , Harry Q. Lee
- Applicant: Abraham Ravid , Boguslaw A. Swedek , Dominic J. Benvegnu , Jeffrey Drue David , Jun Qian , Sidney P. Huey , Ingemar Carlsson , Lakshmanan Karuppiah , Harry Q. Lee
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson
- Main IPC: G01B5/00
- IPC: G01B5/00 ; G06F19/00
Abstract:
A method of generating a library from a reference substrate for use in processing product wafers is described. The method includes measuring substrate characteristics at a plurality of well-defined points of a reference substrate, measuring spectra at plurality of measurement points of the reference substrate, there being more measurement points than well-defined points, and associating measured spectra with measured substrate characteristics.
Public/Granted literature
- US20080243433A1 METHODS AND APPARATUS FOR GENERATING A LIBRARY OF SPECTRA Public/Granted day:2008-10-02
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