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US07842533B2 Electromagnetic radiation sensor and method of manufacture 有权
电磁辐射传感器及其制造方法

Electromagnetic radiation sensor and method of manufacture
Abstract:
A method of forming a semiconductor sensor in one embodiment includes providing a substrate, forming a reflective layer on the substrate, forming a sacrificial layer on the reflective layer, forming an absorber layer with a thickness of less than about 50 nm on the sacrificial layer, forming an absorber in the absorber layer integrally with at least one suspension leg, and removing the sacrificial layer.
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