Invention Grant
- Patent Title: Electromagnetic radiation sensor and method of manufacture
- Patent Title (中): 电磁辐射传感器及其制造方法
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Application No.: US12349860Application Date: 2009-01-07
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Publication No.: US07842533B2Publication Date: 2010-11-30
- Inventor: Matthieu Liger
- Applicant: Matthieu Liger
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Maginot, Moore & Beck
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of forming a semiconductor sensor in one embodiment includes providing a substrate, forming a reflective layer on the substrate, forming a sacrificial layer on the reflective layer, forming an absorber layer with a thickness of less than about 50 nm on the sacrificial layer, forming an absorber in the absorber layer integrally with at least one suspension leg, and removing the sacrificial layer.
Public/Granted literature
- US20100171190A1 Electromagnetic Radiation Sensor and Metod of Manufacture Public/Granted day:2010-07-08
Information query
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