Invention Grant
- Patent Title: Multi-bit non-volatile memory devices and methods of fabricating the same
- Patent Title (中): 多位非易失性存储器件及其制造方法
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Application No.: US11523019Application Date: 2006-09-19
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Publication No.: US07842995B2Publication Date: 2010-11-30
- Inventor: Yoon-Dong Park , Won-Joo Kim
- Applicant: Yoon-Dong Park , Won-Joo Kim
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2005-0126261 20051220
- Main IPC: H01L29/94
- IPC: H01L29/94

Abstract:
A multi-bit non-volatile memory device may include a semiconductor substrate including a body and at least one pair of fins protruding above the body. A first insulation layer may be formed on the body between the at least one pair of fins. A plurality of pairs of control gate electrodes may extend across the first insulation layer and the at least one pair of fins, and may at least partly cover upper portions of outer walls of the at least one pair of fins. A plurality of storage nodes may be formed between the control gate electrodes and the at least one pair of fins, and may be insulated from the substrate. A first distance between adjacent pairs of control gate electrodes may be greater than a second distance between control gate electrodes in each pair.
Public/Granted literature
- US20070141781A1 Multi-bit non-volatile memory devices and methods of fabricating the same Public/Granted day:2007-06-21
Information query
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