Invention Grant
- Patent Title: Semiconductor device
- Patent Title (中): 半导体器件
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Application No.: US12461134Application Date: 2009-08-03
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Publication No.: US07843066B2Publication Date: 2010-11-30
- Inventor: Kazuo Tomita
- Applicant: Kazuo Tomita
- Applicant Address: JP Kawasaki-shi
- Assignee: Renesas Technologies Corporation
- Current Assignee: Renesas Technologies Corporation
- Current Assignee Address: JP Kawasaki-shi
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2005-183264 20050623
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
The present invention provides a semiconductor device capable of preventing occurrence of cracking and the like, taking a large area, where wiring and the like that function as elemental devices can be arranged, within a plurality of interlayer insulation films, and reducing production cost. The semiconductor device according to the present invention has a low dielectric constant film having a dielectric constant of not less than 2.7. In the low dielectric constant film and the like, materials (e.g., a first dummy pattern, a second dummy pattern) with a larger hardness than that of the low dielectric constant film are formed at a part under a pad part.
Public/Granted literature
- US20090289373A1 Semiconductor device Public/Granted day:2009-11-26
Information query
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