Invention Grant
- Patent Title: Apparatus for testing devices
- Patent Title (中): 用于测试设备的设备
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Application No.: US11864690Application Date: 2007-09-28
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Publication No.: US07843202B2Publication Date: 2010-11-30
- Inventor: Eric D. Hobbs , Nobuhiro Kawamata , Andrew W. McFarland , Carl V. Reynolds , Yoichi Urakawa
- Applicant: Eric D. Hobbs , Nobuhiro Kawamata , Andrew W. McFarland , Carl V. Reynolds , Yoichi Urakawa
- Applicant Address: US CA Livermore
- Assignee: FormFactor, Inc.
- Current Assignee: FormFactor, Inc.
- Current Assignee Address: US CA Livermore
- Agency: Kirton & McConkie
- Main IPC: G01R31/02
- IPC: G01R31/02

Abstract:
Methods and apparatus for testing semiconductor devices are provided herein. In some embodiments, an assembly for testing semiconductor devices can include a probe card assembly; and a thermal barrier disposed proximate an upper surface of the probe card assembly, the thermal barrier can restrict thermal transfer between tester side boundary conditions and portions of the probe card assembly disposed beneath the thermal barrier.
Public/Granted literature
- US20080186040A1 APPARATUS FOR TESTING DEVICES Public/Granted day:2008-08-07
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