Invention Grant
- Patent Title: Micromirror system
- Patent Title (中): 微镜系统
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Application No.: US11999808Application Date: 2007-12-07
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Publication No.: US07843620B2Publication Date: 2010-11-30
- Inventor: Stefan Pinter
- Applicant: Stefan Pinter
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102006059073 20061214
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
A micromirror system having at least two micromirrors, each suspended on a substrate wafer via at least one torsion spring. The axes of rotation of the micromirrors are disposed essentially perpendicular to each other in order to permit deflection of an optical beam in two directions essentially perpendicular to each other. The micromirrors and the torsion springs are patterned out of the substrate wafer and lie essentially in one plane.
Public/Granted literature
- US20080144149A1 Micromirror system Public/Granted day:2008-06-19
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