A semiconductor integrated circuit device includes: a plurality of devices under test formed on a substrate; a selection circuit formed on the substrate which selects two of the plurality of devices under test; a magnitude comparison circuit formed on the substrate which measures an electrical characteristic of the two selected devices under test and makes a magnitude comparison between values of the measured electrical characteristic; an address memory circuit formed on the substrate which stores addresses of the two devices under test between which the magnitude comparison has been made; and a control circuit formed on the substrate and connected to the selection circuit, the magnitude comparison circuit, and the address memory circuit.