Invention Grant
- Patent Title: Apparatus and method for improving uniformity in electroplating
- Patent Title (中): 改善电镀均匀性的装置和方法
-
Application No.: US11362433Application Date: 2006-02-24
-
Publication No.: US07846306B2Publication Date: 2010-12-07
- Inventor: Hooman Hafezi , Aron Rosenfeld
- Applicant: Hooman Hafezi , Aron Rosenfeld
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: G01N27/403
- IPC: G01N27/403 ; C25D17/00

Abstract:
A method and apparatus for plating a metal onto a substrate. One embodiment of the present invention provides an apparatus for electroplating a substrate. The apparatus comprises a fluid basin, an anode disposed near a bottom of the fluid basin, a restrictor disposed above the anode, and a substrate support member configured to move the substrate within the fluid basin among different elevations relative to the restrictor. Plating profiles on the substrate may be adjusted by changing the elevation of the substrate during plating.
Public/Granted literature
- US20060201814A1 Apparatus and method for improving uniformity in electroplating Public/Granted day:2006-09-14
Information query