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US07846502B2 Method of positioning patterns from block copolymer self-assembly 有权
从嵌段共聚物自组装定位图案的方法

Method of positioning patterns from block copolymer self-assembly
Abstract:
A method of controlling both alignment and registration (lateral position) of lamellae formed from self-assembly of block copolymers, the method comprising the steps of obtaining a substrate having an energetically neutral surface layer comprising a first topographic “phase pinning” pattern and a second topographic “guiding” pattern; obtaining a self-assembling di-block copolymer; coating the self-assembling di-block copolymer on the energetically neutral surface to obtain a coated substrate; and annealing the coated substrate to obtain micro-domains of the di-block copolymer.
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